Laser Scanning Microscope


With the laser scanning microscope VK-X110 of the company Keyence it is among other things possible to determine profiles and roughnesses. Depth-focused images can be recorded. The light microscope records optical images in different heights (distance to the sample) and combines them, so that not only the current image plane is in focus and sharply imaged, but if possible the whole sample. The design and mode of operation of this microscope allows only reflected light microscopy.

In addition, the surface is measured by means of a laser (red laser, = 658 nm, 0.95 mW) and height data is obtained via the travel times of the laser light. Thus it is possible to record a surface profile with high resolution. The laser light is also guided through the objective of the microscope.

On the same surface, both an optical image with all color information and height data are measured by laser. Combined, they produce a 3-D image of the sample surface with high contrast. The measured height data can be evaluated in various ways with the appropriate software, for example by profile and roughness measurements.

In addition, it is possible to non-destructively determine the layer thickness of e.g. lacquers on suitable samples. The measurement data can be resolved into different planes, which the laser light could penetrate. With known layer properties (refractive index) the layer thicknesses can be determined. If the layer thickness is known beforehand - e.g. by profilometry - it is possible to infer the refractive index of the layer.

Technical data

  • Different objectives for different magnifications
  • Acquisition of depth sharp images
  • High-precision height information by means of laser measurement

Dipl.-Ing. Sven Schulze

Research Assistant

Phone: +49 5323 72-6271